Example: The aerial image of the isolated line was found to differ significantly from that of the dense line. Aerial Image An image of a mask pattern that is projected onto the photoresist-coated wafer by an optical system. Advanced Process Control (APC) The use of automated feedback and feed-forward loops to control a lithographic process.Įxample: Both rework rates and end-of-line yield were improved after turning on the overlay APC system. Example: The HMDS, used as an adhesion promoter, was applied using the vapor prime unit. Adhesion Promoter A chemical that is applied to the surface of a wafer in order to improve the adhesion of resist to the wafer, often by eliminating water from the wafer surface. Example: Due to our inability to plasma etch copper, an additive patterning approach was chosen instead. Examples include lift-off and electroplating processes. Additive Patterning A process by which material is added in the places where the pattern is to be formed. Actinic Wavelength The wavelength used to expose the in a lithographic system.Įxample: Measurement of the refractive index of the substrate at the actinic wavelength is necessary in order to design an optimal BARC. Example: This low activation energy resist will begin its acid-catalyzed deblocking reaction at room temperature. High activation energies produce a large temperature dependence. The Scientist, Gudang download lagu mp3 dan video clips gratis terbesar dan terlengkap di dunia, update file lagu mp3 dan video clips dalam hitungan detik 24 jam.Īctivation Energy Defined by its role in the, the activation energy determines the temperature dependence of chemical reaction rate constants, diffusivities, and other temperature-dependent rate terms. >Download Coldplay - The Scientist mp3 lengkap dengan lirik dan chord lagunya dalam genre pop. Example: Acid-catalyzed resists are the most common type of resist for deep-UV lithography. Acid-Catalyzed Resist A type of chemically amplified resist where an acid is the product of exposure and this acid serves as the catalyst for a thermal reaction which changes the solubility of the resist. Example: The absorption coefficient of the ArF resist was so high that only a thin film of the resist could be used. Example: The aberrations of the objective lens caused a noticeable degradation in image quality.Ībsorption Coefficient The fractional decrease in the intensity of light traveling through a material per unit distance traveled. One way to describe lens aberrations is through a fit to the wavefront error at the exit pupil of the lens for each field point. Examples of lens aberrations include coma, spherical aberration, field curvature, astigmatism, distortion, and chromatic aberration. Glossary of Lithography Terms - A ABC Parameters see Aberrations, Lens Any deviation of the real performance of an optical system (lens) from its ideal () performance.
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